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EB-6A mmW Probe Station

Optimized mmW Probe Station for precise integration with Anritsu Millimeter-Wave Modules

 

The EB-6A is a market proven solution developed closely together with Anritsu and provides the following features:

Features

 - Customized Positioners Specifically For Anritsu Broadband Millimeter-Wave Modules

 - Integrated Heat-Sink and Mount for Millimeter-Wave Modules

 - Precise Integration Allowing Direct Link of Probes

 - Double-Side mmW Probing Upgradeable

 - Coaxial Style High Precision Stage

 - Back-lash free movement

 - 4.5” Probe Card Holder compatible

 - Micropositioner Standby Dock

Applications

 - High Performance RF

 - Single Broadband Probing

 - Dierential mm-Wave

 - Basic DC (IV/CV)

Accessories

 - Hot Chuck with Auxiliary Chuck with Temperature Controller

 - Vibration Free Table

 - Shielding Box

Station Specifications

Station Footprint	760 mm W x 660mm D
Station Height	450 mm (to Platen)/700 mm (to Microscope)
Station Weight	80kg
Platen Material	Hard Chrome Plated Steel
Platen Dimension	250 mm Inner, 450mm
Outer Platen Capacity	12 DC or 4 RF and 4 DC
Positioner Mount	Magnetic ON/OFF Switch
No. of Vacuum Switches	4
Chuck Material	Stainless Steel
Chuck Stage Type	Coaxial
Chuck Travel Range	6” x 6”
Chuck Fine Resolution	1 µm
Chuck Theta Coarse Travel	360˚
Chuck Theta Fine Resolution	0.01˚
Chuck Z-Motion Range	4 mm
Chuck Z-Fine Resolution	1 µm
Coaxial Chuck Movement	Bevelled Gear and Rack 0.8 mm
Pitch Chuck Size	6” (150 mm)
Chuck Planarity	3 µm
Chuck Rigidity	15 µm / 10 N @ edge
Chuck Vacuum Grooves	Center, 0.5”, 1.5” ,2.5” (Individually Controlled)
Chuck Bias Capacity	Up to 2 kV
Chuck Isolation	5 GK
DUT Size Range	2 mm - 150 mm
Microscope Stage Type	High Precision Linear Stage
Microsope Stage Resolution	1 µm
Microscope Stage Travel Range	2” x 2”
Microscope Tilting (Optional)	35˚
Microscope Zoom Range	1x - 2x
Microscope Eye Piece	10x
Microscope Objectives	2x, 10x, 20x
Microscope Magnification Range	20x-400x

商品属性
[Chuck Stage]	Coaxial
[Microscope Stage]	High Precision Linear Stage