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EB-6V mmW Probe Station

Optimized mmW Probe Station for  precise integration with  VDI, OML, Keysight, R&S Millimeter-Wave  Modules

The EB-6V is a market proven solution for mmW research. The following features are available

to the system:

Features

 - Customized positioners to reduce waveguides between millimeter-wave modules and probe head

 - Firm and stable positioners for extenders and tuners of all sizes

 - Integrated dial gauge determining contact scratch on probes

 - Precise integration allowing direct link of probes

 - North and south bridge for additional DC and RF micropositioners

 - Coaxial style high precision stage

 - Back-lash free movement

 - Micropositioner Standby Dock

Applications

 - High Performance RF

 - Single Broadband Probing

 - Dierential mm-Wave

 - Basic DC (IV/CV)

Accessories

 - Hot Chuck with Auxiliary Chuck with Temperature Controller

 - Vibration Free Table

 - Shielding Box

 

Station Specifications

Station Footprint	760 mm W x 660mm D
Station Height	450 mm (to Platen)/700 mm (to Microscope)
Station Weight	80kg
Platen Material	Hard Chrome Plated Steel
Platen Dimension	120 mm x 180 mm (North and South)
Platen Capacity	4 RF and 2 DC or 2 RF and 4 DC
Positioner Mount	Magnetic ON/OFF Switch
No. of Vacuum Switches	4
Chuck Material	Stainless Steel
Chuck Stage Type	Coaxial
Chuck Travel Range	6” x 6”
Chuck Fine Resolution	1 µm
Chuck Theta Coarse Travel	360˚
Chuck Theta Fine Resolution	0.01˚
Chuck Z-Motion Range	4 mm
Chuck Z-Fine Resolution	1 µm
Coaxial Chuck Movement	Bevelled Gear and Rack 0.8 mm Pitch
Chuck Size	6” (150 mm)
Chuck Planarity	3 µm
Chuck Rigidity	15 µm / 10 N @ edge
Chuck Vacuum Grooves	Center, 1.5”, 3.5”,7” (Individually Controlled)
Chuck Bias Capacity	Up to 2 kV
Chuck Isolation	5 GK
DUT Size Range	2 mm - 150 mm
Microscope Stage Type	High Precision Linear Stage
Microsope Stage Resolution	1 µm
Microscope Stage Travel Range	2” x 2”
Microscope Z-Lih(Optional)	6 mm (Pneumatic)
Microscope Zoom Range	1.4x - 9x
Microscope Eye Piece	30x
Microscope Trinocular Port	C-Mount, 2x Adapter
Microscope Magnification Range	42x-270x

商品属性
[Chuck Stage]	Coaxial
[Microscope Stage]	High Precision Linear Stage
[Resolution]	1 µm